Investigation by ellipsometry of the damage in GaAs bombarded with low-energy Ar ions.

Autor: Koprinarov, I. N.1 (AUTHOR), Müller-Jahreis, U.1 (AUTHOR), Thiele, P.1 (AUTHOR)
Zdroj: Applied Physics A: Materials Science & Processing. 1996, Vol. 62 Issue 6, p565-570. 6p. 1 Diagram, 2 Charts, 5 Graphs.
Databáze: Academic Search Ultimate
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ISSN:09478396
DOI:10.1007/BF01571694