Investigation by ellipsometry of the damage in GaAs bombarded with low-energy Ar ions.
Autor: | Koprinarov, I. N.1 (AUTHOR), Müller-Jahreis, U.1 (AUTHOR), Thiele, P.1 (AUTHOR) |
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Zdroj: | Applied Physics A: Materials Science & Processing. 1996, Vol. 62 Issue 6, p565-570. 6p. 1 Diagram, 2 Charts, 5 Graphs. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |
ISSN: | 09478396 |
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DOI: | 10.1007/BF01571694 |