Synthesis and characterization of volatile metal β-diketonate chelates of M(DPM)n (M=Ce, Gd, Y, Zr, n=3,4) used as precursors for MOCVD

Autor: Song, Haizheng1, Jiang, Yinzhu1, Xia, Changrong1, Meng, Guangyao mgym@ustc.edu.cn, Peng, Dingkun1
Zdroj: Journal of Crystal Growth. Apr2003, Vol. 250 Issue 3/4, p423. 8p.
Databáze: Academic Search Ultimate