Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.
| Autor: | Idir, Mourad1, Dovillaire, Guillaume2, Mercere, Pascal3 |
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| Zdroj: | Synchrotron Radiation News. Sep/Oct2013, Vol. 26 Issue 5, p23-29. 7p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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