Synthesis and property of noria (water-wheel like macrocycle) derivatives with pendant alkoxyl and adamantyl ester groups, and their application for extreme ultraviolet resist.
| Autor: | Niina, Nobumitsu1, Kudo, Hiroto2 kudoh@kansai-u.ac.jp, Oizumi, Hiroaki3, Itani, Toshiro3, Nishikubo, Tadatomi4 |
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| Zdroj: | Thin Solid Films. May2013, Vol. 534, p459-464. 6p. |
| Databáze: | Academic Search Ultimate |
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