Large-scale Patterning of Hydrophobic Silicon Nanostructure Arrays Fabricated by Dual Lithography and Deep Reactive Ion Etching.
| Autor: | Zhibo Ma1, Chengyu Jiang1 zbma@nwpu.edu.cn, Weizheng Yuan1, Yang He1 |
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| Zdroj: | Nano-Micro Letters. 2013, Vol. 5 Issue 1, p7-12. 6p. 5 Black and White Photographs, 3 Charts, 1 Graph. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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