Recrystallization of silicon-on-sapphire structures at various amorphization-ion-beam energies.
| Autor: | Alexandrov, P.1 aleksandrov.peter@kiae.ru, Demakov, K.1, Shemardov, S.1, Kuznetsov, Yu.1 |
|---|---|
| Zdroj: | Semiconductors. Feb2013, Vol. 47 Issue 2, p298-300. 3p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|