Evolution of MEMS toward a semiconductor model.
| Autor: | DANEMAN, MIKE1, LIM, MARTIN1, ASSADERAGHI, FARI1 |
|---|---|
| Zdroj: | Electronic Products. Nov2012, Vol. 55 Issue 6, p49-52. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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| Autor: | DANEMAN, MIKE1, LIM, MARTIN1, ASSADERAGHI, FARI1 |
|---|---|
| Zdroj: | Electronic Products. Nov2012, Vol. 55 Issue 6, p49-52. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|