Atom-Probe-Tomographic Studies on Silicon-Based Semiconductor Devices.

Autor:	Inoue, Koji1, Kambham, Ajay Kumar2,3, Mangelinck, Dominique4, Lawrence, Dan5, Larson, David J.5
Zdroj:	Microscopy Today. Sep2012, Vol. 20 Issue 5, p38-44. 7p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu