Annealing of sputter-deposited nanocrystalline Cr–Ta coatings in a low-oxygen-containing atmosphere
Autor: | Chang, Li-Chun1,2 lcchang@mail.mcut.edu.tw, Chen, Yung-I3, Kao, Hsuan-Ling4 |
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Zdroj: | Thin Solid Films. Sep2012, Vol. 520 Issue 23, p6929-6934. 6p. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |