Annealing of sputter-deposited nanocrystalline Cr–Ta coatings in a low-oxygen-containing atmosphere

Autor: Chang, Li-Chun1,2 lcchang@mail.mcut.edu.tw, Chen, Yung-I3, Kao, Hsuan-Ling4
Zdroj: Thin Solid Films. Sep2012, Vol. 520 Issue 23, p6929-6934. 6p.
Databáze: Academic Search Ultimate