Influence of nitrogen concentration on conductivity of N-doped a-SiC:H films deposited by PECVD
| Autor: | Huran, J.1 elekhura@savba.sk, Hotov&ygrave;, I.2, Kobzev, A.P.3, Balalykin, N.I.3 |
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| Zdroj: | Vacuum. Sep2002, Vol. 67 Issue 3/4, p567. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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