Reactive R.F. magnetron sputtering deposition of WO3 thin films

Autor: Lemire, Céline1, Lollman, Dave B.B. dave.lollman@L2MP.u-3mrs.fr, Al Mohammad, Ahmad, Gillet, Eveline1, Aguir, Khalifa1
Zdroj: Sensors & Actuators B: Chemical. Apr2002, Vol. 84 Issue 1, p43. 6p.
Databáze: Academic Search Ultimate