The growth kinetics and optical properties of films deposited in methane glow discharge.

Autor: Barinov, S.1, Svettsov, V.1 svetsov@isuct.ru, Efremov, A.1
Zdroj: High Energy Chemistry. Jul2012, Vol. 46 Issue 4, p276-278. 3p. 5 Graphs.
Databáze: Academic Search Ultimate