The growth kinetics and optical properties of films deposited in methane glow discharge.
Autor: | Barinov, S.1, Svettsov, V.1 svetsov@isuct.ru, Efremov, A.1 |
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Zdroj: | High Energy Chemistry. Jul2012, Vol. 46 Issue 4, p276-278. 3p. 5 Graphs. |
Databáze: | Academic Search Ultimate |
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