Effects of high-flux low-energy (20–100 eV) ion irradiation during deposition on the microstructure and preferred orientation of Ti0.5Al0.5N alloys grown by ultra-high-vacuum reactive magnetron sputtering.
| Autor: | Adibi, F., Petrov, I., Greene, J. E., Hultman, L., Sundgren, J.-E. |
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| Zdroj: | Journal of Applied Physics. 6/15/1993, Vol. 73 Issue 12, p8580. 10p. 3 Black and White Photographs, 1 Diagram, 8 Graphs. |
| Databáze: | Academic Search Ultimate |
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