The constitution of nitrided oxides and reoxidized nitrided oxides on silicon.
| Autor: | Naiman, M. L., Kirk, C. T., Emerson, B. L., Taitel, J. B., Senturia, Stephen D. |
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| Zdroj: | Journal of Applied Physics. 7/15/1985, Vol. 58 Issue 2, p779. 14p. 2 Diagrams, 6 Charts, 7 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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