High-Power Gas-Discharge EUV Source.
| Autor: | Borisov, V. M., Vinokhodov, A. Yu., Ivanov, A. S., Kiryukhin, Yu. B., Mironov, S. V., Mishchenko, V. A., Prokof’ev, A. V., Khristoforov, O. B. |
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| Zdroj: | Plasma Physics Reports. Oct2002, Vol. 28 Issue 10, p877. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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