Selection of metal ion irradiation for controlling Ti1−x Al x N alloy growth via hybrid HIPIMS/magnetron co-sputtering
| Autor: | Greczynski, G.1 grzgr@ifm.liu.se, Lu, J.1, Johansson, M.2, Jensen, J.1, Petrov, I.1,3,4, Greene, J.E.1,3,4,5, Hultman, L.1 |
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| Zdroj: | Vacuum. Feb2012, Vol. 86 Issue 8, p1036-1040. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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