Temperature dependence of contact resistance for Au-Ti-PdSi- n-Si ohmic contacts subjected to microwave irradiation.

Autor: Belyaev, A.1, Boltovets, N.2, Konakova, R.1 konakova@isp.kiev.ua, Kudryk, Ya.1, Sachenko, A.1, Sheremet, V.1, Vinogradov, A.1
Zdroj: Semiconductors. Mar2012, Vol. 46 Issue 3, p330-333. 4p.
Databáze: Academic Search Ultimate