Properties of tungsten oxide thin films formed by ion-plasma and laser deposition methods for MOSiC-based hydrogen sensors.
| Autor: | Fominski, V.1 vyfominskij@mephi.ru, Grigoriev, S.2, Romanov, R.1, Zuev, V.1, Grigoriev, V.1 |
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| Zdroj: | Semiconductors. Mar2012, Vol. 46 Issue 3, p401-409. 9p. |
| Databáze: | Academic Search Ultimate |
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