On the epitaxy of aluminum nitride on silicon substrates in a chloride–hydride process.
| Autor: | Efimov, A. N., Lebedev, A. O., Tsaregorodtsev, A. M. |
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| Zdroj: | Technical Physics Letters. Oct98, Vol. 24 Issue 10, p810. 3p. |
| Databáze: | Academic Search Ultimate |
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