Properties of periodic α-Si:H/a-SiN[sub x]:H structures obtained by nitridization of amorphous-silicon layers.
| Autor: | Bilenko, D. I., Belobrovaya, O. Ya., Galishnikova, Yu. N., Zharkova, É. A., Kazanova, N. P., Koldobanova, O. Yu., Khasina, E. I. |
|---|---|
| Zdroj: | Semiconductors. Mar1998, Vol. 32 Issue 3, p297. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|