The Formation of Volume Elements for Microelectromechanical Systems in Polyimide by Method of Reactive Ion Beam Etching.
| Autor: | Stognij, A. I., Orekhovskaya, T. I., Timoshkov, Yu. V., Koryakin, S. V. |
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| Zdroj: | Technical Physics Letters. Feb2001, Vol. 27 Issue 2, p90. 3p. |
| Databáze: | Academic Search Ultimate |
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