Coaxial microwave plasma source.

Autor: Gritsinin, S.1, Gushchin, P.2, Davydov, A.1, Kossyi, I.1, Kotelev, M.2
Zdroj: Plasma Physics Reports. Nov2011, Vol. 37 Issue 11, p965-971. 7p.
Databáze: Academic Search Ultimate