Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface.
| Autor: | Tomita, Takuro1 tomita@eco.tokushima-u.ac.jp, Kumai, Ryota1, Nomura, Hidenori1, Matsuo, Shigeki1, Hashimoto, Shuichi1, Morita, Ken2, Isu, Toshiro2 |
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| Zdroj: | Applied Physics A: Materials Science & Processing. Oct2011, Vol. 105 Issue 1, p89-94. 6p. |
| Databáze: | Academic Search Ultimate |
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