Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors

Autor: Brunet, M.1 mbrunet@laas.fr, Kotb, H. Mafhoz2, Bouscayrol, L.1, Scheid, E.1, Andrieux, M.3, Legros, C.3, Schamm-Chardon, S.4
Zdroj: Thin Solid Films. Jun2011, Vol. 519 Issue 16, p5638-5644. 7p.
Databáze: Academic Search Ultimate
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