Zone plate focused soft X-ray lithography.
| Autor: | Leontowich, Adam1, Hitchcock, Adam1 aph@mcmaster.ca |
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| Zdroj: | Applied Physics A: Materials Science & Processing. Apr2011, Vol. 103 Issue 1, p1-11. 11p. 3 Black and White Photographs, 3 Charts, 3 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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