Electrical and Optical Characterization of PECVD Silicon Carbon Nitride Thin Films.
| Autor: | Huran, Jozef1 elekhura@savba.sk, Shindov, Peter Hristov2, Smatko, Vasil3 eleksmat@savba.sk, Valovic, Albin1 albin.valovic@savba.sk, Kobzev, Alexander P.4 kobzev@nf.jinr.ru |
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| Zdroj: | Annual Journal of Electronics. 2010, Vol. 4 Issue 1, p94-96. 3p. |
| Databáze: | Academic Search Ultimate |
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