The linkage between macroscopic gettering mechanisms and electronic configuration of 3d-elements in p/p+ epitaxial silicon wafers.
| Autor: | Hölzl, R., Fabry, L., Range, K.J. |
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| Zdroj: | Applied Physics A: Materials Science & Processing. 2002, Vol. 74 Issue 1, p35. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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