The influence of operating parameters on pulsed D.C. magnetron sputtering plasma
Autor: | Karthikeyan, Sreejith s.karthikeyan@edu.salford.ac.uk, Hill, Arthur E.1, Cowpe, John S.1, Pilkington, Richard D.1 |
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Zdroj: | Vacuum. Nov2010, Vol. 85 Issue 5, p634-638. 5p. |
Databáze: | Academic Search Ultimate |
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