The influence of operating parameters on pulsed D.C. magnetron sputtering plasma
| Autor: | Karthikeyan, Sreejith s.karthikeyan@edu.salford.ac.uk, Hill, Arthur E.1, Cowpe, John S.1, Pilkington, Richard D.1 |
|---|---|
| Zdroj: | Vacuum. Nov2010, Vol. 85 Issue 5, p634-638. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|
Full Text from ScienceDirect