Electron-beam-induced damage in amorphous SiO2 and the direct fabrication of silicon nanostructures.
| Autor: | Chen, G. S., Boothroyd, C. B., Humphreys, C. J. |
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| Zdroj: | Philosophical Magazine A. Aug98, Vol. 78 Issue 2, p491-506. 16p. 11 Black and White Photographs, 8 Graphs. |
| Databáze: | Academic Search Ultimate |
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