Crystalline quality improvement in silicon films on sapphire using recrystallization from the silicon-sapphire interface.
| Autor: | Alexandrov, P. A.1 aleksandrov.peter@kiac.ru, Demakov, K. D.1, Shemardov, S. G.1, Kuznetsov, Yu. Yu.1 kuznetsov.yury@kiac.ru |
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| Zdroj: | Semiconductors. Oct2010, Vol. 44 Issue 10, p1386-1388. 3p. 3 Charts, 1 Graph. |
| Databáze: | Academic Search Ultimate |
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