Microelectromechanical actuators based on elastomer and polyimide membranes.
Autor: | Ignat, M.1, Zarnescu, G.2, Cazacu, M.2, Hamciuc, E.2, Hamciuc, C.2 |
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Zdroj: | Electromotion. Jul-Sep2009, Vol. 16 Issue 3, p148-154. 7p. |
Databáze: | Academic Search Ultimate |
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