Microelectromechanical actuators based on elastomer and polyimide membranes.

Autor: Ignat, M.1, Zarnescu, G.2, Cazacu, M.2, Hamciuc, E.2, Hamciuc, C.2
Zdroj: Electromotion. Jul-Sep2009, Vol. 16 Issue 3, p148-154. 7p.
Databáze: Academic Search Ultimate