Surface characteristics of parylene-C films in an inductively coupled O2/CF4 gas plasma

Autor:	Ham, Yong-Hyun1,2, Shutov, Dmitriy Alexandrovich3, Baek, Kyu-Ha2, Do, Lee-Mi2, Kim, Kwangsoo4, Lee, Chi-Woo5, Kwon, Kwang-Ho1 kwonkh@korea.ac.kr
Zdroj:	Thin Solid Films. Sep2010, Vol. 518 Issue 22, p6378-6381. 4p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect