Raith - Electron Beam Lithography for Research.
| Autor: | Kirchner, M.1, Kahl, M.1 |
|---|---|
| Zdroj: | Acta Physica Polonica: A. Dec2009 Supplement, Vol. 116, pS.198-S.200. 3p. 3 Color Photographs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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| Autor: | Kirchner, M.1, Kahl, M.1 |
|---|---|
| Zdroj: | Acta Physica Polonica: A. Dec2009 Supplement, Vol. 116, pS.198-S.200. 3p. 3 Color Photographs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|