Raman investigation of submicro-grained Si films obtained by incoherent UV photo-CVD of silicon hydrides.
| Autor: | Prevot, B., Fuchs, C., Henck, R., Fogarassy, E. |
|---|---|
| Zdroj: | Applied Physics A: Materials Science & Processing. 1998, Vol. 67 Issue 2, p139. 7p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|