Hafnium oxide thin films deposited from a filtered cathodic vacuum arc.
| Autor: | Field, M. R.1 matthew.field@rmit.edu.au, Partridge, J. G.1, du Plessis, J.1, McCulloch, D. G.1 |
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| Zdroj: | Applied Physics A: Materials Science & Processing. Nov2009, Vol. 97 Issue 3, p627-633. 7p. 3 Diagrams, 1 Chart, 4 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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