Two-dimensional numerical simulation of radio frequency sputter amorphous In–Ga–Zn–O thin-film transistors.
Autor: | Fung, Tze-Ching1, Chuang, Chiao-Shun1, Chen, Charlene1, Abe, Katsumi2, Cottle, Robert3, Townsend, Mark3, Kumomi, Hideya2, Kanicki, Jerzy1 |
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Zdroj: | Journal of Applied Physics. Oct2009, Vol. 106 Issue 8, p084511-1-084511-10. 10p. 1 Diagram, 1 Chart, 11 Graphs. |
Databáze: | Academic Search Ultimate |
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