Compositional and structural studies of amorphous silicon-nitrogen alloys deposited at room temperature using a sputtering-type electron cyclotron resonance microwave plasma.
| Autor: | Liu, Y. C., Furukawa, K., Nakashima, H., Kashiwazaki, Y., Gao, D.W., Uchino, K., Muraoka, K., Suzuki, H.T |
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| Zdroj: | Philosophical Magazine B. Jan1999, Vol. 79 Issue 1, p137-148. 12p. 1 Diagram, 10 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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