Effects of rf power on electron density and temperature, neutral temperature, and Te fluctuations in an inductively coupled plasma.
| Autor: | Camparo, James1, Fathi, Gilda1 |
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| Zdroj: | Journal of Applied Physics. May2009, Vol. 105 Issue 10, p103302-1-103302-9. 9p. 1 Diagram, 1 Chart, 6 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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