A test object with a line width less than 10 nm for scanning electron microscopy.
| Autor: | M. Danilova1, V. Mityukhlyaev1, Yu. Novikov2, Yu. Ozerin3, A. Rakov2, P. Todua1 |
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| Zdroj: | Measurement Techniques. Aug2008, Vol. 51 Issue 8, p839-843. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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