Low-temperature production of silicon carbide films of different polytypes.
| Autor: | Semenov, A. V.1 semenov@isc.kharkov.ua, Puzikov, V. M.1, Golubova, E. P.1, Baumer, V. N.1, Dobrotvorskaya, M. V.1 |
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| Zdroj: | Semiconductors. May2009, Vol. 43 Issue 5, p685-689. 5p. 1 Chart, 3 Graphs. |
| Databáze: | Academic Search Ultimate |
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