Ion beam synthesis of SiC by C implantation into SIMOX(111)
| Autor: | dos Reis, R.M.S.1, Maltez, R.L. maltez@if.ufrgs.br, Boudinov, H.1 |
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| Zdroj: | Nuclear Instruments & Methods in Physics Research Section B. May2009, Vol. 267 Issue 8/9, p1281-1284. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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