Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source.
| Autor: | Barkusky, Frank1, Bayer, Armin1, Peth, Christian1, Mann, Klaus1 |
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| Zdroj: | Journal of Applied Physics. Jan2009, Vol. 105 Issue 1, p014906. 7p. 2 Diagrams, 2 Charts, 5 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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