The properties of a-Si:H films produced under various silicon substrate temperatures.
Autor: | Babaev, A.1, Kudoyarova, V.2, Terukov, E.2 |
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Zdroj: | Inorganic Materials. Nov2008, Vol. 44 Issue 12, p1275-1277. 3p. 3 Graphs. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |