Auto-cleaning of deposited tin debris in a laser-produced plasma extreme ultraviolet source by using a liquid jet target containing tin chloride.
| Autor: | Kaku, M.1 kaku@opt.miyazaki-u.ac.jp, Suetake, S.1, Senba, Y.1, Katto, M.2, Kubodera, S.1 |
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| Zdroj: | Applied Physics B: Lasers & Optics. Nov2008, Vol. 93 Issue 2/3, p361-364. 4p. 1 Diagram, 2 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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