Large area SiH4/H2 VHF plasma produced at high pressure using multi-rod electrode
| Autor: | Yamauchi, Yasuhiro1, Takeuchi, Yoshiaki2, Takatsuka, Hiromu1, Kai, Yuichi3, Muta, Hiroshi3, Kawai, Yoshinobu4 kawai@aees.kyushu-u.ac.jp |
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| Zdroj: | Surface & Coatings Technology. Aug2008, Vol. 202 Issue 22/23, p5668-5671. 4p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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