Insights on trap generation and breakdown in ultra thin SiO2 and SiON dielectrics from low voltage stress-induced leakage current measurements
| Autor: | Nicollian, Paul E.1 nicollian@ti.com |
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| Zdroj: | Microelectronics Reliability. Aug2008, Vol. 48 Issue 8/9, p1171-1177. 7p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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