Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source.
| Autor: | Nakamura, D.1 dnakamura@ees.kyushu-u.ac.jp, Tamaru, K.1, Akiyama, T.1, Takahashi, A.2, Okada, T.1 |
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| Zdroj: | Applied Physics A: Materials Science & Processing. Sep2008, Vol. 92 Issue 4, p767-772. 6p. 12 Black and White Photographs, 3 Diagrams, 1 Graph. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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