Advanced Defect Characterization by STEM Analysis.

Autor: Subramanian, Sam1 Sam.Subramanian@freescale.com, Rai, Raghaw, Kiem Ly, Chrastecky, Tony, Mulder, Randy, Harber, Kieth
Zdroj: Electronic Device Failure Analysis. May2008, Vol. 10 Issue 2, p20-28. 6p.
Databáze: Academic Search Ultimate