Effects of O2 addition on microstructure and electrical property for ITO films deposited with several kinds of ITO targets

Autor: Cho, S.H.1, Park, J.H.2, Lee, S.C.3, Cho, W.S.2, Lee, J.H.3, Yon, H.H.2, Song, P.K.1 pksong@pusan.ac.kr
Zdroj: Journal of Physics & Chemistry of Solids. May2008, Vol. 69 Issue 5/6, p1334-1337. 4p.
Databáze: Academic Search Ultimate
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